Role of O(1D) in the oxidation of Si(100) الرابط: https://ieeexplore.ieee.org/Xplore/login.jsp?url=http%3A%2F%2Fieeexplore.ieee.org%2Fs tamp%2Fstamp.jsp%3Ftp%3D%26arnumber%3D4972974&auth Decision=-203